Another use for liquid metals

نویسندگان

چکیده

Michael Dickey covered a number of interesting uses liquid metals in his article “Liquid at room temperature” (Physics Today, April 2021, page 30), but he left out one that has had great practical importance: the liquid-metal ion source (LMIS). Developed 1970s,11. V. E. Krohn, G. R. Ringo, Appl. Phys. Lett. 27, 479 (1975). https://doi.org/10.1063/1.88540 LMIS revolutionized focused-ion-beam (FIB) technology by allowing usable currents (1–10 pA) to be focused diameter only few nanometers. Most FIB systems use gallium because its low vapor pressure temperature, ability stay below melting point, and high surface tension.Among other applications, LMIS-based is used semiconductor manufacturing. High-resolution makes it vastly easier do failure analysis on submicrometer-scale integrated circuits. The also enables rewiring circuits development stage: Conductors can cut new ones added through deposition metallic compounds. That allows design engineers make modifications circuit without needing produce mask set each time. Hundreds papers least three books2–42. J. Orloff, L. Swanson, M. Utlaut, High Resolution Focused Ion Beams: Its Applications, Springer (2003).3. ed., Handbook Charged Particle Optics, 2nd CRC Press (2008).4. A. Giannuzzi, F. Stevie, eds., Introduction Instrumentation, Theory, Techniques Practice, (2005). have applications.ReferencesSection:ChooseTop pageReferences <<1. https://doi.org/10.1063/1.88540, Google ScholarCrossref, ISI2. (2003). ScholarCrossref3. (2008). ScholarCrossref4. ScholarCrossref© 2021 American Institute Physics.

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ژورنال

عنوان ژورنال: Physics Today

سال: 2021

ISSN: ['0031-9228', '1945-0699']

DOI: https://doi.org/10.1063/pt.3.4849